Thin-Film Thickness Measure

Thin-Film Thickness Measure
SM200
Quantity
Description
SM200 is an automatic thin film thickness mapper developed by utilizing the principle of thin film reflected light interference. It uses the light with the widest wavelength range of 200-1700nm to vertically incident on the surface of the thin film. As long as the thin film has a certain degree of transmission, the SM200 can calculate the thickness of the film according to the reflected interference spectrum, as well as other optical constants such as reflectivity. , refractive index and extinction coefficient, etc., the thickness of the maximum mapping range can reach 1nm ~ 250um.
The SM200 automatic optical thin film thickness mapper is constructed by the surveying and mapping host, the surveying and mapping platform, the Y-type optical fiber and the host computer software. The leading generation of automated optical film thickness gauges.
Feature
  • Non-contact, non-destructive testing system;
  • Ultra-long life light source, higher luminous efficiency;
  • High-resolution, high-sensitivity spectrometer, the measurement results are more accurate and reliable;
  • The software interface is intuitive, and the operation is convenient and time-saving;
  • Historical data storage to help users better grasp the results;
  • Desktop distribution design, suitable for rich scenarios;
  • Low maintenance cost and convenient maintenance;
Application
  • Semiconductor coating: photoresist, oxide, desalination layer, silicon-on-insulator, wafer back grinding;
  • Liquid crystal display: gap thickness, polyimide, ITO transparent conductive film;
  • Optical coating: hard coating, anti-reflection layer;
  • Microelectronic system: photoresist, silicon film, printed circuit board;
  • Biomedical: medical equipment, Parylene
 Principle: