Film Thickness Measure Mapping

Film Thickness Measure Mapping
SM280 is a microfilm thickness mapper developed by utilizing the principle of reflection light interference of films. It uses the light with the widest wavelength range of 200-1700nm to be vertically incident on the surface of the film. As long as the film has a certain degree of transmission, the SM280 can calculate the film thickness according to the reflected interference spectrum, and other optical constants such as Reflectivity, refractive index and extinction coefficient, etc., the thickness of the maximum mapping range can reach 10nm ~ 100μm.
The SM280 automatic microscopic film thickness mapper adopts a microscopic system, which can further reduce the spot size, thereby achieving very good spatial resolution. At the same time, the SM280 adopts an integrated design. The core components use a high-resolution, high-sensitivity spectrometer and a high-precision 3-axis mobile platform. Combined with Optronics' unique algorithm technology, it provides users with a new generation of leading automatic microscopy film thickness Surveyor.

  • Non-contact, non-destructive testing system;
  • Fine spot, better spatial resolution;
  • Ultra-long life light source, higher luminous efficiency;
  • High-resolution, high-sensitivity spectrometer, more accurate and reliable mapping results;
  • The software interface is intuitive, and the operation is convenient and time-saving;
  • Integrated real-time camera to monitor measurement points;
  • Equipped with a microscope objective lens to support the detection of small-sized samples;
  • The surveying and mapping speed is fast, and it supports multi-point surveying and mapping point map drawing;
  • Support drawing 2D/3D thickness distribution map of samples;
  • High-precision, long-life 3-axis mobile platform;
  • Historical data storage to help users better grasp the results;
  • Desktop distribution design, suitable for rich scenarios;
  • Biomedical: medical equipment, Parylene
  • Optical coating: hard coating, anti-reflection layer;
  • Semiconductor coating: photoresist, oxide, desalination layer, silicon-on-insulator, wafer back grinding;
  • Microelectronic system: photoresist, silicon film, printed circuit board;
  • Liquid crystal display: gap thickness, polyimide, ITO transparent conductive film;
Work Principle
PC Software