How to apply Raman spectrometer ATR3110-785 on SiC film?

Test object, purpose, tool

• Test equipment: ATR3110-785 (S7031CCD) (200-2400cm-1).
• Test purpose: to test different film samples to obtain the Raman peak of the sample.
• Test tool: probe adjustment frame.
• Test software version: V1.75.

Test sample:

Test method flow:

Using ATR3110-785 (S7031CCD), adjust the probe to focus position of the sample, and set the same integration time of 5000ms and laser power of 200mw to test the sample.

Experiment process and results:

During the test, set the integration time: 5000ms, and the laser power: 200mw. Adjust the probe to the focus.

(1) 3# Test the colored and non-colored areas respectively. No color area (Figure 1):

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Test result: There is an obvious peak at 500.

(2) There are 3 points tested in the color area: there are colors inside, middle and outside. (With the center of the circle as the inside),Colored inner area (As shown below):

Test result: There is an obvious peak at 500. Test result: There are two obvious peaks at 500 and 1000.

(3) Colored central area (As shown below):

Test result: There is an obvious peak at 500. Test result: There are two obvious peaks at 500 and 1000.

(4) Colored outer area (As shown below):

Test result: There is an obvious peak at 500. Test result: There are obvious peaks at 500 and 1000.

(5) 5# measure one point each for the light yellow and red areas. Light yellow area (As shown below):

Test result: There is an obvious peak at 500. Test result: There are obvious peaks at 500 and 1000.

(6) Red area (As shown below):

Test result: There is an obvious peak at 500. Test result: There are obvious peaks at 500 and 1000.

（7） 5# Measure 2-3 points from the center of the color circle outward, taking the inside, middle and outside. The area within the color circle (As shown below):

Test result: There is an obvious peak at 500. Test result: There are obvious peaks at 500 and 1000.

(8) The area in the color circle (As shown below):

Test result: There is an obvious peak at 500. Test result: There are obvious peaks at 500 and 1000.

(9) The area outside the color circle (As shown below):

Test result: There is an obvious peak at 500. Test result: There are obvious peaks at 500 and 1000.

Conclusion

• For 3# sample, no color area, the intensity is weaker than that of the colored area. No color, no characteristic peak near 800cm-1.
• For 4# sample , the intensity of the red area is greater than that of the light yellow area.
• For 5# sample, testing from the center of the color circle outwards, it can be seen that the strength gradually increases from weak.
• After 1000 cm-1, no Raman signal was detected due to fluorescence. During the test, due to the characteristics of the sample itself, it is necessary to carefully adjust the focus to the best position for the test to ensure the best Raman signal.